TFI-P12 Automated Probe Card Vacuum Test Fixture for I-V Measurements
The 120 mm x 120 mm Probe Card Vacuum Test Fixture for I-V Systems is designed to hold and contact multiple devices with both the anode and cathode on the front of the device. The test fixture uses software to control which device is connected to the I-V Measurement System. As a part of the Integrated Test Station, the test fixture enables one- click QE/IPCE/SR and I-V measurements of multiple using a predefined measurement script. The fixture cmicromanipulator probe connections in less than 30 seconds.
A single test fixture can be provided with multiple probe cards or even a micromanipulator probe option to provide maximum "exibility in the types of devices to be probed. You can see two different confgurations of the same fixture in this brochure.
The test fixture is compatible with PV Measurements QE and I-V systems and can be combined with an X-Y stage as show in the pictures here to enable quick measurements of multiple devices on a single substrate. Save measurement time and focus on the science.
Basic Temperature Control
The vacuum stage is mounted to a water circulation plate that can be used to control the temperature of the device being tested. Plumbing fittings are provided. To use this feature, the customer must supply a water circulator with temperature control for the water. Another option is to use thermoelectric temperature control, described below.
Optional Thermoelectric Temperature Control
With the optional thermoelectric temperature control, faster responsiveness and temperature precision are achieved. The thermoelectric modules act as a heat pump between the vacuum plate and the water plate. The water plate serves as the thermal reservoir for the thermoelectric modules. Two temperature ranges are available: The standard temperature control range allows control between 5 °C and 60 °C. The optional high temperature range allows the temperature of the test device to be raised up to 125 °C. These options include a water chiller. No external water connections are necessary.
|Electrical Interface to Measurement System||4 wire|
|Front Electrical Device Connection||17 software controlled Kelvin probes
Joystick micromanipulator probe, 2 included (additional probes optional)
|Back Electrical Device Connection||Kelvin probe from the front
Aluminum vacuum chuck for current measurements
Voltage probes embedded in chuck
|Temperature Sensor||AD590MF embedded in vacuum plate|
|Temperature Sensor||Accuracy ± 0.5 °C|
|Temperature Sensor Precision||± 0.1 °C|
|Standard Range Thermoelectric Temperature Control||5 °C to 60 °C|
|Extended Range Thermoelectric Temperature Control||5 °C to 125 °C|
|Maximum Cell Size||160 mm x 160 mm|
|Minimum Cell Size||5 mm x 5 mm|
|Minimum Contact Pad||2 mm x 2 mm|
|Cell Style||Substrate device (at least one front contact)|
|Soft Contact||Conductive rubber|
Compatible Device Structures
Insulating Substrate Device
Conducting Substrate Device
Traditional Bulk Device
Contact your PV Measurements representative for more details on test fixtures and which one is the best for your application.